

| 儀器型號 | 標準粒子 |
| 380 N3000 | 92nm,240nm |
| 380 Z3000 | 92nm,240nm,zeta |
| 780 APS | 5&10μm |
| 780 SIS | 0.8&2&5μm |
| 780 AD | 0.8&2&5μm |
| 780 FX | 240nm,400nm,1μm |